NanoMap-D (Dual mode) takes imaging to next level. It brings competing techniques – contact and optical profilometer - on one platform. Automatic sample movement and one click measurement, makes NanoMap-D a step forward in imaging world.

Platform Advantages of combination 3D high resolution image Optical profilometer Contact profilometer
  Software Computational power Applications  
    Misc. features    


1 Click movement between Optical and Contact Profiler head

The open platform architecture uses granite, optical flat reference disks. The tester allows upto 200mm scanning area (larger scanning range options available). NanoMap-D comes with antivibration table and acoustic enclosure to ensure complete noise elimination.

Advantages of Contact + Optical Profiler

Combination is a necessity and not a luxury

By exploiting the advantages of both contact and non-contact based techniques for a comprehensive surface characterization NanoMap-D brings its user to a new level of measurement flexibility. The platform can analyse any kind of sample with ease (0% reflectivity, non flat samples etc.)





  • Non contact
  • High sensitivity
  • High measurement speed
  • Material surface requirement
  • Limited surface slope


  • Highly reliable measurement
  • No material surface requirement
  • Higher spatial resolution
  • Contact to sample required
  • Lower measurement speed


HD images

2D, 3D, Histogram etc. views

NanoMap-D generates both 2D and 3D images. Several options to make custom graphs, plots, views such as histogram, radial etc. are possible using provided software.

3d High Res Images

High Res Images


Optical Profilometer

Optical ProfilometerWhite light interferometer

3D optical profilometer is a non contact white light interferometer that generates high resolution 3d and 2D images of surfaces. It comes with multiple objective lenses ranging magnifications from 1x to 100x. AEP technology strives to improve technical specification with every day passing. For latest configuration and specifications please contact us.

Vertical Resolution

0.1nm, 0.02nm

Turret upto

6 objective turret (manual or automatic)

Scan Range Up to

150mm x 150mm (Optional 200mm or more)


0.5x to 100x

Z focusing range

0.1 nm to 10mm


+/- 10 degree

Rotation (theta)

360 Degree

Pixel Standard

1024 x 1024, Optional 1536 x 1536 or 1920 x 1920

Multiple turrets

Six automatic or manual objective
turret to accommodate lenses with
magnifications upto 100X.

Imaging modes

NanoMap-D comes with both PSI
(phase shift interferometry) and
WLI(white light interferometry) modes.
Use depends on the range of
displacements. PSI mode for surface
roughness, step height etc. under 150nm.

Light Source

NanoMap-D offers unprecedented
10 years warranty on its light sources.
The high intensity LED allows to image
sample with almost < 0.4% to 100%
reflectivity. Tester allows user to change
usable wavelength to scan various
kinds of samples.


Contact Profilometer

3D Stylus based scanning with both tip and stage scan mode

Tip Scan using Piezo drive
Tip Scan using Piezo drive

Stage Scan using linear drive
Stage Scan using linear drive

NanoMap-D allows for both tip and stage scan modes. Tip scan uses piezo drive to move the stylus upto 500x500micron area and generates ultra high resolution image. Stage scan moves the sample stage to generate high resolution image. As piezo stage has better XY accuracy, tip scan produces far better image as compared to stage scan mode. With a click of button tip and stage scan modes can be selected on NanoMap-D.

AEP technology strives to improve technical specification with every day passing. For latest configuration and specifications please contact us.

Vertical Resolution

0.1nm with fine range; 0.01um with coarse range

Vertical Dynamic Range

Up to 5um with fine range; up to 2000um with coarse range

Scan Range

Up to 150mm x 150mm (upgrade available)

XY Piezo Stage Resolution


Stylus Loading Force

0.01mg to 100mg

Optical Camera Color camera with

1.5 x 1.5mm FOV

Illumination Bright & dark field illumination

SW settable intensity



Easy and intuitive software

Tester comes with latest windows based OS. NanoMap-D has a intuitive easy to run interface. With one click same area of sample moves between optical and contact profilometer. After the data is collected, images are analysed using powerful imaging software. Few features of software package is listed below

Computational power

High processing speeds

Strong hardware includes 64 bit, multiple core processors. The parallel processor configuration allows data processing independent of the pixel. Tester comes with latest windows based OS. Few features of software package is listed below



Usage limited only by user need


Misc. features

Contact us for more information

The profiler comes with several optional items such as multi chamber vacuum chuck, sample heater, integrated contact profilometer, mechnical modules, built in temperature and humidity sensors, larger scanning area, economical passive antivibration table, UPS etc.